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Title: Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators
Award ID(s):
1711632
PAR ID:
10182201
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
29
Issue:
3
ISSN:
1057-7157
Page Range / eLocation ID:
296 to 305
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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