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Title: Superlattice hole injection layers for UV LEDs grown on SiC

AlGaN-based germicidal UV LEDs show promise in fighting the COVID-19 pandemic through disinfection of air, water, and surfaces. We report UV LEDs grown by MOCVD on SiC substrates, fabricated into thin-film flip chip devices. Replacing theuniformp-AlxGa1-xN layer (x = 0.2) with ashort-period-superlatticeof alternating (x = 0.1 and 0.8) Al-composition improved EQE from 1.3% to 2.7% (3.2% with encapsulation) at 20 A/cm2. Peak EQE and WPE values of 4.8% and 2.8% (287 nm) were measured at current densities below 2 A/cm2, and maximum output power of 7.4 mW (76 mW/mm2) was achieved at 284 nm. Further WPE improvements are expected with both superlattice and uniform layer optimization, improved p-contact metallization, and active region optimization.

 
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NSF-PAR ID:
10184010
Author(s) / Creator(s):
; ; ; ; ; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optical Materials Express
Volume:
10
Issue:
9
ISSN:
2159-3930
Page Range / eLocation ID:
Article No. 2171
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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    Acknowledgment

    This work was partially supported by the U.S. National Science Foundation (NSF) Award No. ECCS-1931088. S.L. and H.W.S. acknowledge the support from the Improvement of Measurement Standards and Technology for Mechanical Metrology (Grant No. 22011044) by KRISS.

    Figure 1

     

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