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Title: TEMPO: Fast Mask Topography Effect Modeling with Deep Learning
Award ID(s):
1718570
PAR ID:
10192081
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
ISPD '20: Proceedings of the 2020 International Symposium on Physical Design
Page Range / eLocation ID:
127 to 134
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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