Ultrathin, High Capacitance Capping Layers for Silicon Electronics with Conductive Interconnects in Flexible, Long‐Lived Bioimplants
- Award ID(s):
- 1752274
- PAR ID:
- 10196410
- Date Published:
- Journal Name:
- Advanced Materials Technologies
- Volume:
- 5
- Issue:
- 1
- ISSN:
- 2365-709X
- Page Range / eLocation ID:
- 1900800
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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