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Title: Area-selective atomic layer deposition enabled by competitive adsorption
Authors:
 ;  ;  ;  ;  
Publication Date:
NSF-PAR ID:
10201063
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
38
Issue:
6
Page Range or eLocation-ID:
Article No. 062411
ISSN:
0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
National Science Foundation
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