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Title: Minimizing filling time for ultraviolet nanoimprint lithography with templates with multiple structures
Authors:
 ;  
Publication Date:
NSF-PAR ID:
10205946
Journal Name:
Journal of Vacuum Science & Technology B
Volume:
39
Issue:
1
Page Range or eLocation-ID:
Article No. 012601
ISSN:
2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
National Science Foundation
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