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Title: Multiphysics simulation of hypersensitive microbolometer sensor using vanadium dioxide and air suspension for millimeter wave imaging
Award ID(s):
1845370 2149886
PAR ID:
10210099
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Microsystem Technologies
ISSN:
0946-7076
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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