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Title: Direct Wavelength-Selective Optical and Electron-Beam Lithography of Functional Inorganic Nanomaterials
Award ID(s):
1905290
PAR ID:
10210419
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
ACS Nano
Volume:
13
Issue:
12
ISSN:
1936-0851
Page Range / eLocation ID:
13917 to 13931
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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