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Title: Direct Determination of Medium Range Ordering in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications
Authors:
; ; ; ; ; ; ; ; ;
Award ID(s):
1729086 1729227
Publication Date:
NSF-PAR ID:
10211180
Journal Name:
Microscopy and Microanalysis
Volume:
26
Issue:
S2
Page Range or eLocation-ID:
248 to 249
ISSN:
1431-9276
Sponsoring Org:
National Science Foundation
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