Acoustically Coupled Wideband RF Filters with Bandwidth Reconfigurablity Using Ferroelectric Aluminum Scandium Nitride Film
- Award ID(s):
- 1752206
- PAR ID:
- 10211323
- Date Published:
- Journal Name:
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Page Range / eLocation ID:
- 1254 to 1257
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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