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Title: Acoustically Coupled Wideband RF Filters with Bandwidth Reconfigurablity Using Ferroelectric Aluminum Scandium Nitride Film
Award ID(s):
1752206
PAR ID:
10211323
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Page Range / eLocation ID:
1254 to 1257
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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