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Title: Damage-Free Atomic Layer Etch of WSe 2 : A Platform for Fabricating Clean Two-Dimensional Devices
Award ID(s):
1752401
NSF-PAR ID:
10214561
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
ACS Applied Materials & Interfaces
Volume:
13
Issue:
1
ISSN:
1944-8244
Page Range / eLocation ID:
1930 to 1942
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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