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Title: Semi-insulating 4H-SiC lateral bulk acoustic wave resonators
Award ID(s):
1839164
PAR ID:
10220080
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
118
Issue:
11
ISSN:
0003-6951
Page Range / eLocation ID:
114002
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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