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Title: Micro-Compression of Freestanding Electroplated Copper Through-Glass Vias
Award ID(s):
1939050
NSF-PAR ID:
10220949
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
IEEE Transactions on Device and Materials Reliability
Volume:
20
Issue:
1
ISSN:
1530-4388
Page Range / eLocation ID:
199 to 203
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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