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Title: Biodegradable, flexible silicon nanomembrane-based NOx gas sensor system with record-high performance for transient environmental monitors and medical implants
Abstract A novel transient electronics technology that is capable of completely dissolving or decomposing in certain conditions after a period of operation offers unprecedented opportunities for medical implants, environmental sensors, and other applications. Here, we describe a biodegradable, flexible silicon-based electronic system that detects NO species with a record-breaking sensitivity of 136 Rs (5 ppm, NO 2 ) and 100-fold selectivity for NO species over other substances with a fast response (~30 s) and recovery (~60 s). The exceptional features primarily depend on not only materials, dimensions, and design layouts but also temperatures and electrical operations. Large-scale sensor arrays in a mechanically pliable configuration exhibit negligible deterioration in performance under various modes of applied loads, consistent with mechanics modeling. In vitro evaluations demonstrate the capability and stability of integrated NO x devices in severe wet environments for biomedical applications.  more » « less
Award ID(s):
1933072
PAR ID:
10222521
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
NPG Asia Materials
Volume:
12
Issue:
1
ISSN:
1884-4049
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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