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Title: Actuation Dependency of Frequency Tuning in MEMS Resonators
Award ID(s):
1854750
PAR ID:
10228643
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
29
Issue:
2
ISSN:
1057-7157
Page Range / eLocation ID:
132 to 134
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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