Recently, the application of transition metal mononitrides (TMNs) to plasmonics and nonlinear optics has grown at an astounding rate. TiN and ZrN have emerged as the dominating materials in this direction. However, even though ZrN is reported to have lower dielectric losses and enhanced tunability in plasmonic applications when compared with TiN, the body of work regarding TiN is much more mature than that of ZrN. This imbalance of work regarding ZrN may be in part an effect of pollution in precursor materials for the fabrication of ZrN, leading to an increased imaginary part of permittivity and frustration in reproduction of ZrN with literature‐like properties. Herein, the effects of Hf defects (a common pollutant in Zr) on the optical properties of nitride films grown with radio frequency (RF) magnetron sputtering are reported. Hf defects are introduced into nitride films with a sputtering target made of the Hf‐polluted “grade 702” Zr alloy. Hf defects are found in all analyzed films with concentrations at around ≈0.5−1 at %. Chemical, structural, and optical properties of RF magnetron‐sputtered Hf
Titanium nitride (TiN) is highly attractive for plasmonics and nanophotonics applications owing to its gold‐like but tunable optical properties. Its prodigious potential for plasmonics has been demonstrated on sapphire or bulk MgO. For a transformational impact, high optical quality TiN on Si is required instead, which would support the integration of nanophotonics with the complementary metal‐oxide‐semiconductor (CMOS) electronics. However, TiN grown on Si, even at elevated temperatures, lacks the optical quality needed, imposed by the large lattice mismatch between them. Here, a novel approach is reported wherein a thin MgO interlayer is inserted between TiN and Si. The improved crystalline quality enabled by MgO for TiN on Si(001) leads to a significant enhancement of the plasmonic figure of merit (FOM = −
- Award ID(s):
- 1808928
- NSF-PAR ID:
- 10230683
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Photonics Research
- Volume:
- 2
- Issue:
- 7
- ISSN:
- 2699-9293
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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