Ferroelectric Aluminum Scandium Nitride Thin Film Bulk Acoustic Resonators with Polarization‐Dependent Operating States
- Award ID(s):
- 1944304
- PAR ID:
- 10232798
- Date Published:
- Journal Name:
- physica status solidi (RRL) – Rapid Research Letters
- Volume:
- 15
- Issue:
- 5
- ISSN:
- 1862-6254
- Page Range / eLocation ID:
- 2100034
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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