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Title: Thermal Characterization of Ferroelectric Aluminum Scandium Nitride Acoustic Resonators
Award ID(s):
1944304
PAR ID:
10232800
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
IEEE MEMS
Page Range / eLocation ID:
214 to 217
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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