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Title: A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al 0.7 Sc 0.3 N Film Bulk Acoustic Resonator
Award ID(s):
1944304
PAR ID:
10232801
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
IEEE International Frequency Control Symposium
Page Range / eLocation ID:
1 to 3
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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