Computational fluid dynamics modeling of a new high-pressure chemical vapor deposition reactor design
- Award ID(s):
- 1726395
- PAR ID:
- 10234848
- Date Published:
- Journal Name:
- Journal of Crystal Growth
- Volume:
- 566-567
- Issue:
- C
- ISSN:
- 0022-0248
- Page Range / eLocation ID:
- 126155
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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