Two-step growth of β-Ga 2 O 3 films on (100) diamond via low pressure chemical vapor deposition
- NSF-PAR ID:
- 10273766
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 39
- Issue:
- 2
- ISSN:
- 0734-2101
- Page Range / eLocation ID:
- 023411
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation