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Title: Two-step growth of β-Ga 2 O 3 films on (100) diamond via low pressure chemical vapor deposition
Authors:
; ; ; ; ; ; ;
Award ID(s):
2019753 1810041 1755479
Publication Date:
NSF-PAR ID:
10273766
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
39
Issue:
2
Page Range or eLocation-ID:
023411
ISSN:
0734-2101
Sponsoring Org:
National Science Foundation
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