High-temperature low-pressure chemical vapor deposition of β-Ga 2 O 3
- Award ID(s):
- 1755479
- NSF-PAR ID:
- 10274382
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 38
- Issue:
- 5
- ISSN:
- 0734-2101
- Page Range / eLocation ID:
- 050806
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation