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Title: High-temperature low-pressure chemical vapor deposition of β-Ga 2 O 3
Award ID(s):
1755479
PAR ID:
10274382
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
38
Issue:
5
ISSN:
0734-2101
Page Range / eLocation ID:
050806
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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