Title: Effects of atmosphere composition during direct ultraviolet-light patterning of solution-deposited In2O3 thin film transistors
Award ID(s):
1904521
PAR ID:
10276599
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Thin Solid Films
Volume:
733
Issue:
C
ISSN:
0040-6090
Page Range / eLocation ID:
138829
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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