Zheng, Bocong, Fu, Yangyang, Wang, Keliang, Schuelke, Thomas, and Fan, Qi Hua. Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target. Retrieved from https://par.nsf.gov/biblio/10278468. Plasma Sources Science and Technology 30.3 Web. doi:10.1088/1361-6595/abe9f9.

Zheng, Bocong, Fu, Yangyang, Wang, Keliang, Schuelke, Thomas, & Fan, Qi Hua. Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target. Plasma Sources Science and Technology, 30 (3). Retrieved from https://par.nsf.gov/biblio/10278468. https://doi.org/10.1088/1361-6595/abe9f9

Zheng, Bocong, Fu, Yangyang, Wang, Keliang, Schuelke, Thomas, and Fan, Qi Hua. "Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target". Plasma Sources Science and Technology 30 (3). Country unknown/Code not available. https://doi.org/10.1088/1361-6595/abe9f9. https://par.nsf.gov/biblio/10278468.

@article{osti_10278468,
place = {Country unknown/Code not available}, title = {Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target}, url = {https://par.nsf.gov/biblio/10278468}, DOI = {10.1088/1361-6595/abe9f9}, abstractNote = {}, journal = {Plasma Sources Science and Technology}, volume = {30}, number = {3}, author = {Zheng, Bocong and Fu, Yangyang and Wang, Keliang and Schuelke, Thomas and Fan, Qi Hua}, editor = {null} }