Metal-Assisted Chemical Etching of (001) β-Ga2O3

Hsien-Chih Huang, Zhongjie Ren

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Metal-Assisted Chemical Etching of (001) β-Ga2O3

Award ID(s):: 1809946

NSF-PAR ID:: 10283881

Author(s) / Creator(s):: Hsien-Chih Huang, Zhongjie Ren

Date Published:: 2021-05-01

Journal Name:: 2020 Compound Semiconductor Week (CSW)

Format(s):: Medium: X

Sponsoring Org:: National Science Foundation

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