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Title: Feedforward Control Algorithms for MEMS Galvos and Scanners
Award ID(s):
1647837
PAR ID:
10304923
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
30
Issue:
4
ISSN:
1057-7157
Page Range / eLocation ID:
p. 612-621
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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