Singhania, Raivathari M., Price, Henry, Kounga, Vaneck Y., Davis, Benjamin, Brüner, Philipp, Thorpe, Ryan, Hynek, David J., Cha, Judy J., and Strandwitz, Nicholas C. Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering. Journal of Vacuum Science & Technology A 39.6 Web. doi:10.1116/6.0001164.

Singhania, Raivathari M., Price, Henry, Kounga, Vaneck Y., Davis, Benjamin, Brüner, Philipp, Thorpe, Ryan, Hynek, David J., Cha, Judy J., & Strandwitz, Nicholas C. Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering. Journal of Vacuum Science & Technology A, 39 (6). https://doi.org/10.1116/6.0001164

Singhania, Raivathari M., Price, Henry, Kounga, Vaneck Y., Davis, Benjamin, Brüner, Philipp, Thorpe, Ryan, Hynek, David J., Cha, Judy J., and Strandwitz, Nicholas C. "Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering". Journal of Vacuum Science & Technology A 39 (6). Country unknown/Code not available: American Vacuum Society. https://doi.org/10.1116/6.0001164. https://par.nsf.gov/biblio/10305505.

@article{osti_10305505,
place = {Country unknown/Code not available}, title = {Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering}, url = {https://par.nsf.gov/biblio/10305505}, DOI = {10.1116/6.0001164}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A}, volume = {39}, number = {6}, publisher = {American Vacuum Society}, author = {Singhania, Raivathari M. and Price, Henry and Kounga, Vaneck Y. and Davis, Benjamin and Brüner, Philipp and Thorpe, Ryan and Hynek, David J. and Cha, Judy J. and Strandwitz, Nicholas C.}, }