Nitrogen ion-implanted resistive regions for edge termination of vertical Ga 2 O 3 rectifiers
- Award ID(s):
- 1856662
- NSF-PAR ID:
- 10306208
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 39
- Issue:
- 6
- ISSN:
- 0734-2101
- Page Range / eLocation ID:
- Article No. 063405
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation