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Title: Nitrogen ion-implanted resistive regions for edge termination of vertical Ga 2 O 3 rectifiers
Award ID(s):
1856662
NSF-PAR ID:
10306208
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
39
Issue:
6
ISSN:
0734-2101
Page Range / eLocation ID:
Article No. 063405
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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