Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features
- NSF-PAR ID:
- 10306227
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 39
- Issue:
- 6
- ISSN:
- 2166-2746
- Page Range / eLocation ID:
- Article No. 064003
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation