MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays
- Award ID(s):
- 1711839
- NSF-PAR ID:
- 10308853
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 27
- Issue:
- 6
- ISSN:
- 1057-7157
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1109/JMEMS.2018.2874231
