Methods to achieve ultra-high quality factor silicon nitride resonators

Ji, Xingchen; Roberts, Samantha; Corato-Zanarella, Mateus; Lipson, Michal

doi:10.1063/5.0057881

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Citation Details

Methods to achieve ultra-high quality factor silicon nitride resonators

Award ID(s):: 1936345

PAR ID:: 10310310

Author(s) / Creator(s):: Ji, Xingchen; Roberts, Samantha; Corato-Zanarella, Mateus; Lipson, Michal

Date Published:: 2021-07-01

Journal Name:: APL Photonics

Volume:: 6

Issue:: 7

ISSN:: 2378-0967

Format(s):: Medium: X

Sponsoring Org:: National Science Foundation

Free Publicly Accessible Full Text
Accepted Manuscript
Journal Article:
https://doi.org/10.1063/5.0057881

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