Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
- Award ID(s):
- 1635334
- NSF-PAR ID:
- 10310486
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 39
- Issue:
- 6
- ISSN:
- 2166-2746
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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