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Title: Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
Award ID(s):
1635334
NSF-PAR ID:
10310486
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology B
Volume:
39
Issue:
6
ISSN:
2166-2746
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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