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Title: A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges
Award ID(s):
1925037
PAR ID:
10310629
Author(s) / Creator(s):
;
Editor(s):
Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans
Date Published:
Journal Name:
MOEMS and Miniaturized Systems XX
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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