A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges
- Award ID(s):
- 1925037
- PAR ID:
- 10310629
- Editor(s):
- Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans
- Date Published:
- Journal Name:
- MOEMS and Miniaturized Systems XX
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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