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Title: Atomic layer deposition of sodium fluoride thin films
Award ID(s):
1727026
PAR ID:
10310707
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
39
Issue:
3
ISSN:
0734-2101
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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