Kuraitis, Sara, Kang, Donghyeon, Mane, Anil U., Zhou, Hua, Soares, Jake, Elam, Jeffrey W., and Graugnard, Elton. Atomic layer deposition of sodium fluoride thin films. Retrieved from https://par.nsf.gov/biblio/10310707. Journal of Vacuum Science & Technology A 39.3 Web. doi:10.1116/6.0000847.

Kuraitis, Sara, Kang, Donghyeon, Mane, Anil U., Zhou, Hua, Soares, Jake, Elam, Jeffrey W., & Graugnard, Elton. Atomic layer deposition of sodium fluoride thin films. Journal of Vacuum Science & Technology A, 39 (3). Retrieved from https://par.nsf.gov/biblio/10310707. https://doi.org/10.1116/6.0000847

Kuraitis, Sara, Kang, Donghyeon, Mane, Anil U., Zhou, Hua, Soares, Jake, Elam, Jeffrey W., and Graugnard, Elton. "Atomic layer deposition of sodium fluoride thin films". Journal of Vacuum Science & Technology A 39 (3). Country unknown/Code not available. https://doi.org/10.1116/6.0000847. https://par.nsf.gov/biblio/10310707.

@article{osti_10310707,
place = {Country unknown/Code not available}, title = {Atomic layer deposition of sodium fluoride thin films}, url = {https://par.nsf.gov/biblio/10310707}, DOI = {10.1116/6.0000847}, abstractNote = {}, journal = {Journal of Vacuum Science & Technology A}, volume = {39}, number = {3}, author = {Kuraitis, Sara and Kang, Donghyeon and Mane, Anil U. and Zhou, Hua and Soares, Jake and Elam, Jeffrey W. and Graugnard, Elton}, }