Atomic layer deposition of sodium fluoride thin films
- Award ID(s):
- 1727026
- PAR ID:
- 10310707
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 39
- Issue:
- 3
- ISSN:
- 0734-2101
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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