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Title: Controlling preferential growth of chromium – Nitrogen R-HiPIMS and R-DCMS films by substrate magnetic biasing
Award ID(s):
2042982
PAR ID:
10312342
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Applied Surface Science
Volume:
569
Issue:
C
ISSN:
0169-4332
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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