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Title: In-Plane Bulk Acoustic Resonators Using 50nm-Thick Nano-Laminated Ferroelectric Hf0.5Zr0.5O2
Award ID(s):
1752206
PAR ID:
10314732
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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