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Title: Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
Authors:
; ; ; ; ; ; ; ;
Award ID(s):
1752844
Publication Date:
NSF-PAR ID:
10320239
Journal Name:
Applied Physics Letters
Volume:
119
Issue:
13
ISSN:
0003-6951
Sponsoring Org:
National Science Foundation
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