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Title: Comparison of single and concentric split-ring resonator generated microplasmas
Award ID(s):
1655280
PAR ID:
10321150
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology B
Volume:
40
Issue:
1
ISSN:
2166-2746
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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