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Title: Microscale patterning of semiconductor c-Si by selective laser-heating induced KOH etching
Award ID(s):
2005098
PAR ID:
10326529
Author(s) / Creator(s):
;
Date Published:
Journal Name:
Semiconductor Science and Technology
Volume:
36
Issue:
8
ISSN:
0268-1242
Page Range / eLocation ID:
085002
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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