Link between Gas Phase Reaction Chemistry and the Electronic Conductivity of Atomic Layer Deposited Titanium Oxide Thin Films
- Award ID(s):
- 1805084
- PAR ID:
- 10327694
- Date Published:
- Journal Name:
- The Journal of Physical Chemistry Letters
- Volume:
- 12
- Issue:
- 14
- ISSN:
- 1948-7185
- Page Range / eLocation ID:
- 3625 to 3632
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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