Growth evolution of high-quality MOCVD aluminum nitride using nitrogen as carrier gas on the sapphire substrate
- Award ID(s):
- 2124624
- PAR ID:
- 10329389
- Date Published:
- Journal Name:
- Journal of Materials Research
- Volume:
- 36
- Issue:
- 21
- ISSN:
- 0884-2914
- Page Range / eLocation ID:
- 4360 to 4369
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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