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Title: Preliminary study of photomask pattern inspection by beam-shaped knife-edge interferometry
Award ID(s):
1855473
PAR ID:
10334473
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Precision Engineering
Volume:
77
Issue:
C
ISSN:
0141-6359
Page Range / eLocation ID:
104 to 109
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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