Gas source chemical vapor deposition of hexagonal boron nitride on C-plane sapphire using B2H6 and NH3
- Award ID(s):
- 1808900
- Publication Date:
- NSF-PAR ID:
- 10335155
- Journal Name:
- Journal of Materials Research
- Volume:
- 36
- Issue:
- 23
- Page Range or eLocation-ID:
- 4678 to 4687
- ISSN:
- 0884-2914
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Publisher's Version of Record
- https://doi.org/10.1557/s43578-021-00446-5
