Talukder, Al-Ahsan, Baule, Nina, Steinhorst, Maximilian, Shrestha, Maheshwar, Fan, Qi Hua, and Schuelke, Thomas. Pulsed direct-current reactive sputtering of high Young's modulus [002] oriented aluminum nitride thin films. Retrieved from https://par.nsf.gov/biblio/10335252. Thin Solid Films 751.C Web. doi:10.1016/j.tsf.2022.139239.

Talukder, Al-Ahsan, Baule, Nina, Steinhorst, Maximilian, Shrestha, Maheshwar, Fan, Qi Hua, & Schuelke, Thomas. Pulsed direct-current reactive sputtering of high Young's modulus [002] oriented aluminum nitride thin films. Thin Solid Films, 751 (C). Retrieved from https://par.nsf.gov/biblio/10335252. https://doi.org/10.1016/j.tsf.2022.139239

Talukder, Al-Ahsan, Baule, Nina, Steinhorst, Maximilian, Shrestha, Maheshwar, Fan, Qi Hua, and Schuelke, Thomas. "Pulsed direct-current reactive sputtering of high Young's modulus [002] oriented aluminum nitride thin films". Thin Solid Films 751 (C). Country unknown/Code not available. https://doi.org/10.1016/j.tsf.2022.139239. https://par.nsf.gov/biblio/10335252.

@article{osti_10335252,
place = {Country unknown/Code not available}, title = {Pulsed direct-current reactive sputtering of high Young's modulus [002] oriented aluminum nitride thin films}, url = {https://par.nsf.gov/biblio/10335252}, DOI = {10.1016/j.tsf.2022.139239}, abstractNote = {}, journal = {Thin Solid Films}, volume = {751}, number = {C}, author = {Talukder, Al-Ahsan and Baule, Nina and Steinhorst, Maximilian and Shrestha, Maheshwar and Fan, Qi Hua and Schuelke, Thomas}, }