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Title: Micro-fabrication of Si-based optomechanical inertial sensors for cryogenic temperatures
Award ID(s):
1945832
PAR ID:
10353786
Author(s) / Creator(s):
;
Date Published:
Journal Name:
Proc. SPIE 11817, Applied Optical Metrology IV
Page Range / eLocation ID:
118170G
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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