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Title: Surface Integrity of Diamond Turned (100)Ge
Award ID(s):
1727244 1437232
PAR ID:
10357990
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Procedia CIRP
Volume:
108
Issue:
C
ISSN:
2212-8271
Page Range / eLocation ID:
665 to 669
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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