skip to main content


Title: A Chip-Scale, Low Cost PVD System
Award ID(s):
1647837
PAR ID:
10365466
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
29
Issue:
6
ISSN:
1057-7157
Page Range / eLocation ID:
p. 1547-1555
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found