A Chip-Scale, Low Cost PVD System
- Award ID(s):
- 1647837
- PAR ID:
- 10365466
- Publisher / Repository:
- Institute of Electrical and Electronics Engineers
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 29
- Issue:
- 6
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- p. 1547-1555
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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