skip to main content

Title: Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models
Authors:
 ;  ;  ;  ;  ;  ;  ;  
Publication Date:
NSF-PAR ID:
10378883
Journal Name:
ACS Omega
Volume:
7
Issue:
45
Page Range or eLocation-ID:
p. 41033-41043
ISSN:
2470-1343
Publisher:
American Chemical Society
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found