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Title: Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models
PAR ID:
10378883
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Chemical Society
Date Published:
Journal Name:
ACS Omega
Volume:
7
Issue:
45
ISSN:
2470-1343
Page Range / eLocation ID:
p. 41033-41043
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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