The fabrication of periodic 3D nanostructures with uniform material properties has been widely investigated and is important for applications in photonics, mechanics, and energy storage. However, creating nanostructures with spatially varying lattice geometry and material composition is still largely an unexplored challenge in nanofabrication. This work presents the fabrication of non‐uniform nanolattices by patterning multiple layers of 3D nanostructures using phase shift lithography and atomic layer deposition. By controlling the processing parameters, the lattice geometry and material composition of each individual nanolattice layer can be tailored to create arbitrary material property profiles. Using the proposed method, a five‐layer nanolattice with spatially varying porosity and oxide materials has been demonstrated. This process can be used to create gradient‐index antireflection nanostructures, and a fabricated four‐layer nanolattice structure consisting of TiO2and Al2O3with gradually varying porosity reduces more than 90% of the specular reflectance from a silicon substrate. By enabling nanolattices with arbitrary profiles in physical properties, the demonstrated technique can find broad applications in nanophotonics, graded filters, energy storage systems, and nanoarchitected films.
Three-dimensional (3D) nanostructures play a crucial role in nanophotonics, lasers, and optical systems. This article reports on the fabrication of 3D nanostructures consisting of opal structures that are spatially aligned to an array of holes defined in the photoresist. The proposed method uses colloidal lithography to pattern a hexagonal array of holes, which are then used to direct the subsequent 3D assembly of colloidal particles. This approach allows the 3D opal structures to be aligned with the 2D array of holes, which can enhance spatial-phase coherence and reduce defects. The polymer patterns can be used as a sacrificial template for atomic layer deposition and create free-standing nanolattices. The final structure consists of a combination of nanolattice, upon which controlled deposition of opal structures is achieved. These structures result in nanostructured materials with high porosity, which is essential to create low-index materials for nanophotonics. A thick layer of titanium oxide with high refractive index is deposited over nanolattices to demonstrate the mechanical stability of underlying structures. These nanolattice structures with precisely controlled height can serve as a low-index layer and can find applications in Bragg reflectors, nanophotonics, and optical multilayers.
more » « less- NSF-PAR ID:
- 10379479
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 40
- Issue:
- 6
- ISSN:
- 2166-2746
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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